Bond nature of oxygen-deficient HfO2/Si(100) film

Applied Physics Letters

Volumn 89, Issue 25, 2006, Pages

  Cho, Deok Yong ^a   Min, C H ^a   Kim, Jungho ^a   Oh, S J ^a   Kim, Min Gyu ^b  

^a Seoul National University   (South Korea)

^b POSTECH   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; BINDING ENERGY; FILM GROWTH; HAFNIUM COMPOUNDS; PULSED LASER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

BOND LENGTH; BONDING ENVIRONMENT; X-RAY ABSORPTION;

THIN FILMS;

EID: 33845951597     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2410214     Document Type: Article

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