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Volumn 3, Issue 9, 2006, Pages 708-712
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Polymerization in nanocrystalline diamond films by oxygen incorporation
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Author keywords
Conductivity; Diamond like carbon (DLC); Nanocomposites; Nanocrystalline films; Plasma enhanced chemical vapor deposition (PECVD)
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Indexed keywords
ADDITION REACTIONS;
CHEMICAL BONDS;
DESORPTION;
DIAMOND LIKE CARBON FILMS;
NANOSTRUCTURED MATERIALS;
OXYGEN;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
CARBON CLUSTERS;
OXYGEN INCORPORATION;
PLASMA POLYMERIZATION;
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EID: 33845866934
PISSN: 16128850
EISSN: 16128869
Source Type: Journal
DOI: 10.1002/ppap.200600044 Document Type: Conference Paper |
Times cited : (5)
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References (16)
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