Effect of hydrogen plasma exposure on the amount of trans-polyacetylene in nanocrystalline diamond films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 263-266

  Teii, Kungen ^a   Ikeda, Tomohiro ^a   Fukutomi, Atsushi ^a   Uchino, Kiichiro ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; DIAMOND FILMS; GRAIN SIZE AND SHAPE; PLASMAS; RAMAN SCATTERING; SILICON;

GAS PHASE; HYDROGEN PLASMA EXPOSURE; RAMAN PEAK;

NANOSTRUCTURED MATERIALS;

EID: 31544463049     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2163885     Document Type: Article

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