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Sensors and Materials

Volumn 14, Issue 3, 2002, Pages 151-166

Integration of LIGA structures with CMOS circuitry

(2) Stadler, Stefan a Ajmera, Pratul K a

a LOUISIANA STATE UNIVERSITY (United States)

Author keywords

Integrated HARMS; Integrated microdevices; Integrated systems; LIGA; MEMS; Monolithic integration

Indexed keywords

EID: 0036350448 PISSN: 09144935 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (8)

References (35)

1
- 0004055022
- Artech House, Inc. Boston
- (2000) An Introduction to Microelectromechanical Systems Engineering
- Maluf, N.¹

2
- 0004169367
- WCB McGraw-Hill, Boston
- (1998) Micromachined Transducers Sourcebook
- Kovacs, G.T.A.¹

3
- 0004222832
- Wiley-VCH, Weinheim
- (2001) Microsystem Technology
- Menz, W.¹ Mohr, J.² Paul, O.³

4
- 0004181625
- CRC Press, Boca Raton
- (1997) Fundamentals of Microfabrication
- Madou, M.¹

5
- 0003532560
- Kluwer Academic, Boston
- (2001) Microsystem Design
- Senturia, S.D.¹

6
- 0004171924
- John-Wiley, New York
- (1994) Semiconductor Sensors
- Sze, S.M.¹

7
- 0026834706
- (1992) J. Solid-State Circuits , vol.27 , pp. 433
- Ji, J.¹ Wise, K.D.²

8
- 0027003705
- Hilton Head, SC (IEEE, New York)
- (1992) Dig. IEEE Solid-State Sensors and Actuators Workshop , pp. 19
- Najafi, N.¹ Wise, K.D.²

9
- 85076975754
- San Diego, CA (SPIE, Bellingham, WA)
- (1997) Proc. of SPIE Smart Structures and Materials , vol.3046 , pp. 52
- Davies, B.R.¹ Barron, C.C.² Montague, S.³ Smith, J.H.⁴ Murray, J.R.⁵ Christenson, T.R.⁶ Bateman, V.I.⁷

10
- 0010122541
- Los Angeles (ISHM, Seattle)
- (1995) Proc. of ISHM , pp. 95
- Stadler, S.¹ Ajmera, P.K.²

11
- 0010082241
- MS Thesis (Louisiana State University, Baton Rouge)
- (1997)
- Stadler, S.¹

12
- 0004222746
- (Artech House, Boston) Chap. 3-4
- (1994) Sensor Technology and Devices
- Ristic, L.¹

13
- 0010144908
- Galvanoformung, Abformung
- LIGA is a German acronym for Lithographie

14
- 0030415551
- Technical Digest, San Francisco, CA (IEEE, New York)
- (1996) IEEE Intl. Electron Device Meeting , pp. 521
- Baltes, H.¹ Paul, O.² Korvink, J.G.³ Schneider, M.⁴ Buhler, J.⁵ Schneeberger, N.⁶ Jaeggi, D.⁷ Malcovati, P.⁸ Hornung, M.⁹ Haberli, A.¹⁰ Von Arx, M.¹¹ Mayer, F.¹² Funk, J.¹³

15
- 0035426066
- (2001) Sensors and Actuators A , vol.92 , pp. 1
- Baltes, H.¹ Brand, O.²

16
- 0001420621
- (1998) Microsystem Technologies , vol.4 , pp. 139
- Sparks, D.R.¹ Huang, X.² Higdon, W.³ Johnson, J.D.⁴

17
- 0001849888
- Hilton Head, SC (IEEE, New York)
- (1994) Digest, Solid State Sensors and Actuators Workshop , pp. 213
- Putty, M.W.¹ Najafi, K.²

18
- 0032048647
- (1998) Sensors and Actuators A , vol.66 , pp. 138
- Chang, S.¹ Chia, M.² Castillo-Borelley, P.³ Higdon, W.⁴ Jiang, Q.⁵ Johnson, J.⁶ Obedier, L.⁷ Putty, M.⁸ Shi, Q.⁹ Sparks, D.¹⁰ Zarabadi, S.¹¹

19
- 0022717983
- (1986) Microelectronic Engineering , vol.4 , pp. 35
- Becher, E.W.¹ Ehrfeld, W.² Hagmann, P.³ Maner, A.⁴ Munchmeyer, D.⁵

20
- 0007815166
- Univ. of California, Berkeley
- (1990) Dissertation
- Tang, W.C.-K.¹

21
- 0009712031
- Univ. of Karlsruhe, Germany
- (1995) Dissertation
- Both, A.¹

22
- 0010134950
- Thesis (Microsystemtechnology, Fachhochschule Regensburg, Germany)
- (1995)
- Stadler, S.¹

23
- 0010204097
- Lafayette, LA (IEEE, New York)
- (1994) th IEEE Midwest Systems Conf. , pp. 187
- Gumma, M.R.¹ Srivastava, A.² Cherukuri, J.³

24
- 0032046592
- (1998) Materials Letters , vol.35 , pp. 18
- Stadler, S.¹ Ajmera, P.K.²

25
- 4344664781
- Weinheim, Germany
- (1993) Mikrosystemtechnik ruer Ingenieure
- Menz, W.¹ Bley, P.²

26
- 84967848455
- (1994) Am. Vacc. Soc. , vol.12 , pp. 2559
- Guckel, H.¹ Skrobis, K.J.² Klien, J.³ Christenson, T.R.⁴

27
- 0030313035
- Santa Clara, CA (SPIE, Bellingham)
- (1996) Proc. of SPIE 96 , pp. 360
- Vladimirsky, O.¹ Calderon, G.² Vladimirsky, Y.³ Manohara, H.⁴

28
- 0041979363
- San Diego, CA (SPIE, Bellingham, WA)
- (1998) th Annual Intl. Symp. on Smart Structures and Materials , vol.3328 , pp. 14
- Ajmera, P.K.¹ Stadler, S.² Abdollahi, N.³

29
- 0003494870
- Academic Press, New York
- (1978) Thin Film Processes
- Vossen, J.L.¹ Kern, W.²

30
- 0010193581
- Center for X-ray Lithography, Univ. of Wisconsin, Madison
- CXrL Toolset
- Cerrina, F.¹

31
- 0010190777
- Thesis (Louisiana State University, Baton Rouge)
- (1999)
- Abdollahi, N.¹

32
- 0010180011
- CAMD, Baton Rouge, LA
- (1996) Proc. of CAMD Workshop
- Stadler, S.¹ Ajmera, P.K.²

33
- 0003495751
- John Wiley, New York
- (1989) Ionizing Radiation Effects in MOS Devices and Circuits
- Ma, T.P.¹ Dressendorfer, P.V.²

34
- 54749111611
- Univ. of Karlsruhe, Germany
- (1988) Dissertation
- Harsch, S.¹

35
- 0029325709
- (1995) J. Microelectromechanical Systems , vol.4 , pp. 66
- Abe, T.¹ Messner, W.C.² Reed, M.L.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.