The design and fabrication of a flexible three-dimensional force sensor skin

2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS

Volumn , Issue , 2005, Pages 1818-1823

  Shan, Jian Hua ^a,b   Mei, Tao ^a   Sun, Lei ^a   Kong, De Yi ^a   Zhang, Zheng Yong ^a   Ni, Lin ^a   Meng, Max ^a   Chu, Jia Ru ^b  

^a INSTITUTE OF INTELLIGENT MACHINES   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Flexible skin; MEMS sensor; Three dimensional force

Indexed keywords

FABRICATION; INTELLIGENT ROBOTS;

DESIGN ANALYSIS; FABRICATION PROCESS; FLEXIBLE TACTILE SENSORS; MEMS SENSORS; MEMS TECHNOLOGY; NON-PLANAR SURFACES; PRINTING CIRCUIT BOARD; THREE DIMENSIONAL FORCES;

FLEXIBLE ELECTRONICS;

EID: 33845722229     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2005.1545265     Document Type: Conference Paper

References (9)

1. B. J. Kane, Mark R. Cutkosky, Gregory T. A. Kovacs, "CMOScompatible traction stress sensor for use in high-resolution tactile imaging," Sensors and Actuators, A54(1996), pp. 511-516. (Pubitemid 126357003)
2. B. J. Kane, Mark R. Cutkosky, Gregory T. A. Kovacs "A Traction Stress Sensor Array for Use in High-Resolution Robotic Tactile Imaging," Journal of Microelectromechanical Systems, vol. 9, no. 4, December 2000 pp. 424-434.
3. Z. Chu, P. M. Sarro, S. Middelhoek, "Silicon three-axial tactile sensor," Sensors and Actuators, A54(1996), pp. 505-510. (Pubitemid 126357002)
4. W. L. Jin, C. D. Mote, "Development and calibration of a sub-millimeter three-component force sensor," Sensors and Actuators A65(1998), pp. 88-94.
5. Lin Wang, David J. Beebe, "A silicon-based shear force sensor: development and characterization," Sensors and Actuators, A84(2000), pp. 33-44.
6. Fukang Jiang, Gwo-Bin Lee, Yu-Chong Tai, Chih-Ming Ho, "A flexible micromachine-based shear-stress sensor array and its application to separation-point detection," Sensors and Actuators, A79(2000), pp. 194- 203. (Pubitemid 30556639)
7. Yong Xu, Fukang Jiang, et al. "Flexible shear-stress sensor skin and its application to unmanned aerial vehicles," Sensors and Actuators, A105(2003), pp. 321-329.
8. Jonathan Engel, Jack Chen, Chang Liu, "Development of polyimide flexible tactile sensor skin," Journal of Micromechanics and microengineering, 13(2003), pp. 359-366.
9. Tao Mei, Wen J. Li, et al. "An integrated MEMS three-dimensional tactile sensor with large force range," Sensors and Actuators A80(2000) pp. 155-162. (Pubitemid 30559022)