Sharpening of field-ion specimens and positioning of features of interest by ion-beam milling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 328-333

  Larson, D J ^a,c   Russell, K F ^a   Cerezo, A ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF OXFORD   (United Kingdom)

^c SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMINUTION; CRYSTAL MICROSTRUCTURE; GRAIN BOUNDARIES; ION BEAMS; MICROSCOPIC EXAMINATION;

ATOM-PROBE FIELD-ION MICROSCOPY; ION-BEAM MILLING;

SEMICONDUCTOR MATERIALS;

EID: 0033712830     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591194     Document Type: Article

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