Comparison of conventional and collapsed region operation of capacitive micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 10, 2006, Pages 1918-1932

  Huang, Yongli ^a,b   Hæggström, Edward ^c   Bayram, Baris ^a,d   Zhuang, Xuefeng ^a,d   Ergun, Arif Sanh ^a,d   Cheng, Ching Hsiang ^d   Khuri Yakub, Butrus T ^a,d  

^a IEEE

^b Kolo Technologies Inc   (United States)

^c UNIVERSITY OF HELSINKI   (Finland)

^d STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AC PULSES; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUTS); COLLAPSED REGION; WAFER BONDING;

CAPACITANCE; COMPUTER SIMULATION; ELECTRIC POTENTIAL; MICROMACHINING; PRESSURE EFFECTS; ULTRASONIC MEASUREMENT;

ULTRASONIC TRANSDUCERS;

EID: 33845611656     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.125     Document Type: Article

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