Recent progress in multi-element alloy and nitride coatings sputtered from high-entropy alloy targets

Annales de Chimie: Science des Materiaux

Volumn 31, Issue 6, 2006, Pages 723-736

  Cheng, Keng Hao ^a   Lai, Chia Han ^a   Lin, Su Jien ^a,b   Yeh, Jien Wei ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b CMS ITRI   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; ANNEALING; COATINGS; ENTROPY; NANOSTRUCTURED MATERIALS; NITRIDES; SOLID SOLUTIONS;

AMORPHOUS PHASE; HIGH ENTROPY ALLOY; MULTI ELEMENT ALLOY; PHASE STABILITY;

INTERMETALLICS;

EID: 33845591347     PISSN: 01519107     EISSN: None     Source Type: Journal    
DOI: 10.3166/acsm.31.723-736     Document Type: Article

References (40)

1. B. North, Six issues for the hard coatings community, Surf. Coat. Technol. 106 (1998) 129-134.
2. W.D. Sproul, New routes in the preparation of mechanically hard films, Science 273 (1996) 889-892.
3. D.M. Mattox, Ion plating - past, present and future, Surf. Coat. Technol. 133 (2000) 517-521.
4. B. Window, Issues in magnetron sputtering of hard coatings, Surf. Coat. Technol. 81 (1996) 92-98.
5. J.G. Han, J.S. Yoon, H.J. Kim, K. Song, High temperature wear resistance of (TiAl)N films synthesized by cathodic arc plasma deposition, Surf. Coat. Technol. 87-8 (1996) 82-87.
6. C. Schonjahn, M. Bamford, L.A. Donohue, D.B. Lewis, S. Forder, W.D. Munz, The interface between TiAlN hard coatings and steel substrates generated by high energetic Cr+ bombardment, Surf. Coat. Technol. 125 (2000) 66-70.
7. C. Subramanian, K.N. Strafford, T.P. Wilks, L.P. Ward, On the design of coating systems: Metallurgical and other considerations, J. Mater. Process. Technol. 56 (1996) 385-397.
8. S. PalDey, S.C. Deevi, Single layer and multilayer wear resistant coatings of (Ti, Al)N: a review, Mater. Sci. Eng. A 342 (2003) 58-79.
9. J.W. Yeh, S.K. Chen, S.J. Lin, J.Y. Gan, T.S. Chin, T.T. Shun, C.H. Tsau, S.Y. Chang, Nanostructured high-entropy alloys with multiple principal elements: Novel alloy design concepts and outcomes, Adv. Mater. 6 (2004) 299-303.
10. C.Y. Hsu, J.W. Yeh, S.K. Chen, T.T. Shun, Wear resistance and high-temperature compression strength of Fee CuCoNiCrAl0.5Fe alloy with boron addition, Metall. Mater. Trans. A 35A (2004) 1465-1469.
11. Y.Y. Chen, U.T. Hong, J.W. Yeh, H.C. Shih, Mechanical properties of a bulk Cu0.5NiAlCoCrFeSi glassy alloy in 288 degrees C high-purity water, Appl. Phys. Lett. 87 (2005)
12. U. Helmersson, S. Todorova, S.A. Barnett, J.E. Sundgren, L.C. Markert, J.E. Greene, Growth of Single-Crystal Tin Vn Strained-Layer Superlattices with Extremely High Mechanical Hardness, J. Appl. Phys. 62 (1987) 481-484.
13. M. Shinn, L. Hultman, S.A. Barnett, Growth, Structure, and Microhardness of Epitaxial TiN/NbN Superlattices, J. Mater. Res. 7 (1992) 901-911.
14. S. Fouvry, B. Wendler, T. Liskiewicz, A. Dudek, L. Kolodziejczyk, Fretting wear analysis of TiC/VC multilayered hard coatings: experiments and modelling approaches, Wear 257 (2004) 641-653.
15. K.K. Shih, D.B. Dove, Ti/Ti-N Hf/Hf-N and W/W-N Multilayer Films with High Mechanical Hardness, Appl. Phys. Lett. 61 (1992) 654-656.
16. S.J. Bull, A.M. Jones, Multilayer coatings for improved performance, Surf. Coat. Technol. 78 (1996) 173-184.
17. X. Chu, S.A. Bamett, Model of Superlattice Yield Stress and Hardness Enhancements, J. Appl. Phys. 77(1995) 4403-4411.
18. S. Veprek, A.S. Argon, Towards the understanding of mechanical properties of super- and ultrahard nanocomposites, J. Vac. Sci. Technol. B 20 (2002) 650-664.
19. A.A. Voevodin, J.S. Zabinski, Load-adaptive crystalline-amorphous nanocomposites, J. Mater. Sci. 33 (1998) 319-327.
20. S. Veprek, The search for novel, superhard materials, J. Vac. Sci. Technol. A 17 (1999) 2401-2420.
21. J. Musil, Hard and superhard nanocomposite coatings, Surf. Coat. Technol. 125 (2000) 322-330.
22. F.H.W. Loffler, Systematic-Approach to Improve the Performance of PVD Coatings for Tool Applications, Surf. Coat. Technol. 68 (1994) 729-740.
23. W.D. Munz, Titanium Aluminum Nitride Films - a New Alternative to TiN Coatings, J. Vac. Sci. Technol. A 4 (1986) 2717-2725.
24. O. Knotek, M. Bohmer, T. Leyendecker, On Structure and Properties of Sputtered Ti and Al Based Hard Compound Films, J. Vac. Sci. Technol. A4 (1986) 2695-2700.
25. L.A. Donohue, D.B. Lewis, W.D. Munz, M.M. Stack, S.B. Lyon, H.W. Wang, D. Rafaja, The influence of low concentrations of chromium and yttrium on the oxidation behaviour, residual stress and corrosion performance of TiAIN hard coatings on steel substrates, Vacuum 55 (1999) 109-114.
26. W.D. Sproul, M.E. Graham, M.S. Wong, P.J. Rudnik, Reactive Unbalanced Magnetron Sputtering of the Nitrides of Ti, Zr, Hf, Cr, Mo, Ti-Al, Ti-Zr and Ti-Al-V, Surf. Coat. Technol. 61 (1993) 139-143.
27. S.J. Bull, A.M. Jones, A.R. McCabe, Residual-Stress In Ion-Assisted Coatings, Surf. Coat. Technol. 54 (1992) 173-179.
28. T.K. Chen, T.T. Shun, J.W. Yeh, M.S. Wong, Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering, Surf. Coat. Technol. 188-89 (2004) 193-200.
29. T.K. Chen, M.S. Wong, T.T. Shun, J.W. Yeh, Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering, Surf. Coat. Technol. 200 (2005) 1361-1365.
30. S. Hofmann, Target And Substrate Surface-Reaction Kinetics In Magnetron Sputtering Of Nitride Coatings, Thin Solid Films 191 (1990) 335-348.
31. L. Hultman, J.E. Sundgren, J.E. Greene, Formation Of Polyhedral N2 Bubbles During Reactive Sputter Deposition Of Epitaxial Tin(100) Films, J. Appl. Phys. 66 (1989) 536-544.
32. J. Pelleg, L.Z. Zevin, S. Lungo, N. Croitoru, Reactive-Sputter-Deposited Tin Films On Glass Substrates, Thin Solid Films 197 (1991) 117-128.
33. P.B. Barna, M. Adamik, Fundamental structure forming phenomena of polycrystalline films and the structure zone models. Thin Solid Films 317 (1998) 27-33.
34. C.-H. Lai, S.-J. Lin, J.-W. Yeh, S.-Y. Chang, Preparation and characterization of AlCrTaTiZr multi-element nitride coatings, Surf. Coat. Technol. In Press, Corrected Proof
35. S.Y Yoon, S.Y. Yoon, W.S. Chung, K.H. Kim, Impact-wear behaviors of TiN and Ti-Al-N coatings on AISI D2 steel and WC-Co substrates, Surf. Coat. Technol. 177 (2004) 645-650.
36. M. Wittling, A. Bendavid, P.J. Martin, M.V. Swain, Influence of thickness and substrate on the hardness and deformation of TiN films, Thin Solid Films 270 (1995) 283-288.
37. A.C. Vlasveld, S.G Harris, E.D. Doyle, D.B. Lewis, W.D. Munz, Characterisation and performance of partially filtered arc TiAIN coatings, Surf. Coat. Technol. 149 (2002) 217-224.
38. J.E. Sundgren, Structure And Properties Of Tin Coatings, Thin Solid Films 128 (1985) 21-44.
39. A. Leyland, A. Matthews, On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour, Wear 246 (2000) 1-11.
40. M.A. Baker, P.J. Kench, C. Tsotsos, P.N. Gibson, A. Leyland, A. Matthews, Investigation of the nanostructure and wear properties of physical vapor deposited CrCuN nanocomposite coatings, J. Vac. Sci. Technol. A 23 (2005) 423-433.