A CMOS micromachined capacitive tactile sensor with high-frequency output

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1708-1714

  Ko, Cheng Ting ^a   Tseng, Sheng Hsiang ^a,b   Lu, Michael S C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL APPLIED RESEARCH LABORATORIES   (Taiwan)

Author keywords

Astable oscillator; Capacitive sensor; Complementary metal oxide semiconductor (CMOS) microelectromechanical systems (MEMS)

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; OSCILLATORS (MECHANICAL); WSI CIRCUITS;

CAPACITIVE SENSOR; FINGERPRINT RECOGNITION; SPRING CONSTANT; TACTILE SENSOR;

CMOS INTEGRATED CIRCUITS;

EID: 33845523830     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883569     Document Type: Article

References (28)

1. C. W. Swonger, D. M. Bowers, and R. M. Stock, Fingermatrix, Inc. U.S. Pat. 4 210 899, Jul. 1980.
2. R. E. Bowles and D. E. Bowles US Patent 4,525,859, Jun. 1986.
3. Atmel Corp., AT77C101B FingerChip Datasheet San Jose, CA, USA.
4. B. Charlot, F. Parrain, N. Galy, S. Basrour, and B. Courtois, "A sweeping mode integrated fingerprint sensor with 256 tactile microbeams," J. Microelectromech. Syst., vol. 13, no. 4, pp. 636-644, Aug. 2004.
5. J. W. Lee, D. J. Min, J. Kim, and W. Kim, "A 600-dpi capacitive finger print sensor chip and image-synthesis technique," IEEE J. Solid-State Circuits, vol. 34, pp. 469-475, Apr. 1999.
6. M. Tartagni and R. Guerrieri, "A fingerprint sensor based on the feedback capacitive sensing scheme," IEEE J. Solid-State Circuits, vol. 33, no. 1, pp. 133-142, Jan. 1998.
7. K. Ma+chida, S. Shigematsu, H. Morimura, Y. Tanabe, N. Sato, N. Shimoyama, T. Kumazaki, K. Kudou, M. Yano, and H. Kyuragi, "A novel semiconductor capacitive sensor for a single-chip fingerprint sensor/ identifier LSI," IEEE Trans. Electron Devices, vol. 48, pp. 2273-2278, Oct. 2001.
8. A. H. Kramer, STMicroelectronics, Inc. US Patent 6,839,052, Jan. 2005.
9. A. G. Knapp, U.S. Philips Corp. U.S. Pat. 5 325 442, Jun. 28, 1994.
10. D. R. Setlak, N. W. Van Vonno, M. Newton, and M. M. Salatino, AuthenTec, Inc. U.S. Pat. 6 088 471, Jul. 2000.
11. N. Sato, K. Machida, H. Morimura, S. Shigematsu, K. Kudou, M. Yano, and H. Kyuragi, "MEMS fingerprint sensor immune to various finger surface conditions," IEEE Trans. Electron Devices, vol. 50, no. 4, pp. 1109-1116, Apr. 2003.
12. R. J. De Souza and K. D. Wise, "A very high density bulk micromachined capacitive tactile imager," in Proc. Int. Conf. on Solid-State Sensors and Actuators (Transducers), Chicago, IL, Jun. 16-19, 1997, pp. 1473-1476.
13. P. Rey, P. Charvet, M. T. Delaye, and S. Abou Hassan, "A high density capacitive pressure sensor array for fingerprint sensor application," in Proc. Int. Conf. on Solid-State Sensors and Actuators (Transducers), Chicago, IL, Jun. 16-19, 1997, pp. 1453-1456.
14. C.-T. Ko, J.-P. Wu, W.-C. Wang, C.-H. Huang, S.-H. Tseng, Y.-L. Chen, and M. S.-C. Lu, "A highly sensitive CMOS-MEMS capacitive tactile sensor," in Proc. 19th IEEE Int. Conf. Micro Electro Mech. Syst., Istanbul, Turkey, Jan. 22-26, 2006, pp. 642-645.
15. M. S.-C. Lu, X. Zhu, and G. K. Fedder, "Material property measurement of 0.5 μm CMOS microstructures," in Proc. Microelectromech. Struct. Mater. Res. Symp., San Francisco, CA, 1998, pp. 27-32.
16. S. D. Senturia, Microsystem Design. New York: Kluwer Academic, 2001, pp. 222-235.
17. S. P. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells, 2nd ed. New York: McGraw-Hill, 1959.
18. ANSYS, ANSYS, Inc.. Canonsburg, PA.
19. MemElectro Toolbox CoventorWare, Coventor, Inc.. Cary, NC, 2005.
20. M. S.-C. Lu and G. Fedder, "Position control of parallel-plate microactuators for probe-based data storage," J. Microelectromech. Syst., vol. 13, no. 5, pp. 759-769, Oct. 2004.
21. C. T.-C. Nguyen and R. Howe, "An integrated CMOS micromechanical resonator high-Q oscillator," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, Apr. 1999.
22. M. Lemkin and B. E. Boser, "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 456-468, Apr. 1999.
23. S. Chatzandroulis, D. Tsoukalas, and P. A. Neukomm, "A miniature pressure system with a capacitive sensor and a passive telemetry link for use in implantable applications," J. Microelectromech. Syst., vol. 9, no. 1, pp. 18-23, Mar. 2000.
24. C. S. Sanders, J. W. Knutti, and J. D. Meindl, "A monolithic capacitive pressure sensor with pulse-period output," IEEE Trans. Electron Devices, vol. 27, no. 5, pp. 927-930, May 1980.
25. J. Ji, S. Cho, Y. Zhang, K. Najafi, and K. D. Wise, "An ultraminiature COS pressure sensor for a multiplexed cardiovascular catheter," IEEE Trans. Electron Devices, vol. 39, no. 10, pp. 2260-2267, Oct. 1992.
26. A. Cichocki and R. Unbehauen, "Application of switched capacitor self-oscillating circuits to the conversion of RLC parameters into a frequency or a digital output," Sens. Actuators A, Phys., vol. 24, pp. 129-137, 1990.
27. A. S. Sedra and K. C. Smith, Microelectronic Circuits, 5th ed. New York: Oxford University Press, 2004.
28. D. A. Johns and K. Martin, Analog Integrated Circuit Design. New York: Wiley, 1997, ch. 3.