Defects in solid phase and laser crystallised polysilicon thin film transistors

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 1207-1212

  Petinot, F ^a,b   Plais, F ^a   Mencaraglia, D ^b   Legagneux, P ^a   Reita, C ^a   Huet, O ^a   Pribat, D ^a  

^a THALES   (France)

^b UNIV PARIS SUD   (France)

Author keywords

Density of states; Laser crystallisation; Polycrystalline silicon; Solid phase crystallisation

Indexed keywords

CRYSTALLIZATION; ELECTRONIC DENSITY OF STATES; GRAIN BOUNDARIES; LASER APPLICATIONS; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON;

LASER CRYSTALLIZATION; SOLID PHASE CRYSTALLIZATION;

THIN FILM TRANSISTORS;

EID: 0032065069     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00279-8     Document Type: Article

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