Non-destructive testing using picosecond ultrasonics

AIP Conference Proceedings

Volumn 820 I, Issue , 2006, Pages 210-217

  Maris, Humphrey J ^a   Antonelli, G Andrew ^b   Ford, Wayne K ^a   Morath, Christopher J ^c   Stoner, Robert J ^d   Tas, Guray ^c  

^a BROWN UNIVERSITY   (United States)

^b INTEL CORPORATION   (United States)

^c RUDOLPH TECHNOLOGIES INC   (United States)

^d ZYGO CORPORATION   (United States)

Author keywords

Metrology; Nanostructures; Picoseconds; Semiconductors; Ultrasonics

Indexed keywords

EID: 33845456119     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2184531     Document Type: Conference Paper

References (24)

1. C. Thomsen, J. Strait, Z. Vardeny, H.J. Maris, J. Taue and J.J. Hauser, Phys. Rev. Lett. 53, 989-992 (1984).
2. C. Thomsen, H.T. Grahn, H.J. Maris and J. Taue, Phys. Rev. B34, 4129-4138 (1986).
3. G. Tas and H.J. Maris, Phys. Rev. B 49, 15046-15054 (1994).
4. H.T. Grahn, H.J. Maris, J. Taue, and K.S. Hatton, Appl. Phys. Lett. 53, 2281-2283 (1988);
5. W. Chen, H.J. Maris, Y. Lu, and G. Xiao, Phys. Rev. B50, 14506-14515 (1994).
6. H.N. Lin, R.J. Stoner, H.J. Maris and J. Taue, J. Appl. Phys., 69, 3816-3822 (1991).
7. W. Chen, H.J. Maris, Z.R. Wasilewski, and S. Tamura, Phil. Mag. 70, 687 (1994).
8. C.D. Zhu, HJ. Maris and J. Taue, Phys. Rev. B 44, 4281-4289 (1991);
9. C.J. Morath and H.J. Maris, Phys. Rev. B 54, 203-213 (1996).
10. A Vertikov, M. Kuball, A.V. Nurmikko and H.J. Maris, Appl. Phys. Lett. 69, 2465-2467 (1996).
11. H.T. Grahn, Z. Vardeny, J. Taue, H.J. Maris and B. Abeles, J. Non Cryst. Sol. 97-98, 855-858 (1987).
12. H.T. Grahn, H.J. Maris, J. Taue, and B. Abeles, Phys. Rev. B38, 6066-6074 (1988);
13. H.T. Grahn, D.A. Young, HJ. Maris, J. Taue, J.M. Hong, and T.P. Smith III, Appl. Phys. Lett. 53, 2023-2024 (1988).
14. Rudolph Technologies Inc., Flanders, New Jersey.
15. See, for example, S. Wolf, Microchip Manufacturing, (Lattice Press, Sunset Beach, California, 2004).
16. C.J. Morath, G.J. Collins, R.G. Wolf and R.J. Stoner, Solid State Technology, 40, 85-90 (1997).
17. G.Tas, R.J. Stoner, H.J. Maris, G.W. Rubloff, G.S. Oehrlein, and J.M. Halbout, Appl. Phys. Lett. 61, 1787-1789 (1992);
18. G. Tas, J.J. Loomis, H.J. Maris, A.A. Baues, and L.E. Seiberling, Appl. Phys. Lett. 72, 2235-2237 (1998);
19. H.Y. Hao, H.J. Maris, and D.K. Sadana, Electrochem. and Solid State Lett. 1, 54 (1998).
20. S. Leary, G. Tas and T. Johnson, Solid State Technology 46, 32-34 (2003).
21. C. Lavoie, C. Cabral, J.M. Harper, G. Tas, C.J. Morath, R.J. Stoner and H.J. Maris, Thin Solid Films 374, 42 (2000).
22. G.A. Antonelli and H.J. Maris, "Studies of Plasticity in Thin Al Films Using Picosecond Ultrasonics," in Thin Films - Stresses and Mechanical Properties, edited by R. Vinci, O. Kraft, N. Moody, P. Besser, and E. Shaffer, Materials Research Society Proceedings Vol. 594, , p. 483-488, (2000).
23. H.-N. Lin, L.B. Freund, H.J. Maris, J. Taue, K.Y. Lee, H. Luhn, and D.P. Kern, J. Appl. Phys. 73, 37-45 (1993).
24. G.A. Antonelli, H.J. Maris, S.G. Malhotra and J.M.E. Harper, J. Appl. Phys. 91, 3261-3267 (2002).