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Volumn 91, Issue 5, 2002, Pages 3261-3267

Picosecond ultrasonics study of the vibrational modes of a nanostructure

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Indexed keywords


EID: 33845404352     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1435831     Document Type: Article
Times cited : (91)

References (36)
  • 6
    • 0029307028 scopus 로고
    • Rigorous Coupled Wave Analysis [see, for example, M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, J. Opt. Soc. Am. A 12, 1068 (1995)] can be used to calculate the reflectivity of a patterned structure. To calculate ΔR(t), it would be necessary to calculate the reflectivity R of the structure before excitation and again at time t after the geometry has changed as a result of the propagating strain pulses.
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1068
    • Moharam, M.G.1    Grann, E.B.2    Pommet, D.A.3    Gaylord, T.K.4
  • 10
    • 33845394901 scopus 로고    scopus 로고
    • As heat flows into the dielectric films, their optical constants will also change
    • As heat flows into the dielectric films, their optical constants will also change.
  • 12
    • 84866575717 scopus 로고    scopus 로고
    • x of the wave number parallel to the wafer is zero
    • x of the wave number parallel to the wafer is zero.
  • 21
    • 33845460866 scopus 로고    scopus 로고
    • note
    • The density of bulk TaN may be found in Ref. 13; however, the density of thin film TaN depends on the deposition technique.
  • 22
    • 33845399916 scopus 로고    scopus 로고
    • note
    • Strictly this orthogonality relation holds only for a closed system, but since the modes radiate at a slow rate we expect it to be a good approximation.
  • 24
    • 33845400613 scopus 로고    scopus 로고
    • We have used the sound velocities in the [100] direction
    • We have used the sound velocities in the [100] direction.
  • 25
    • 33845421341 scopus 로고    scopus 로고
    • note
    • We are ignoring the fact that mode 6 has a frequency that is slightly above the cutoff for transverse radiation.
  • 27
    • 33845451354 scopus 로고    scopus 로고
    • note
    • -3, 3.5 GPa, and 0.4 which are consistent with values found in
  • 36
    • 33845438221 scopus 로고    scopus 로고
    • note
    • Problems of modes of nearby frequency could be fixed by applying the mode identification technique discussed in Ref. 23.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.