Successful use of low-k films requires measuring Young's modulus

Solid State Technology

Volumn 46, Issue 10, 2003, Pages

  Leary, Sean ^a   Tas, Guray ^a   Johnson, Tim ^a  

^a RUDOLPH TECHNOLOGIES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FUSED SILICA; LASER PULSES; LIGHT INTERFERENCE; LIGHT REFLECTION; MATHEMATICAL MODELS; METALLIC FILMS; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS;

FLUORINATED SILICA GLASS; INTERLEVEL DIELECTRIC;

DIELECTRIC FILMS;

EID: 0142180009     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)