Detection of cobalt silicide phase formations by ultrafast optical measurements

Thin Solid Films

Volumn 374, Issue 1, 2000, Pages 42-48

  Lavoie, C ^a   Cabral Jr , C ^a   Harper, J M E ^a   Tas, G ^b   Morath, C J ^b   Stoner, R J ^c   Maris, H J ^c  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b RUDOLPH TECHNOLOGIES INC   (United States)

^c BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COBALT COMPOUNDS; HELIUM; OPTICAL PUMPING; OPTICAL VARIABLES MEASUREMENT; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THERMAL EFFECTS; THICK FILMS;

COBALT SILICIDE; ULTRAFAST OPTICAL MEASUREMENTS;

ULTRAFAST PHENOMENA;

EID: 0034291073     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01191-3     Document Type: Article

References (10)

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