Ultrasonic multilayer metal film metrology

Solid State Technology

Volumn 40, Issue 6, 1997, Pages 85-92

  Morath, C J ^a   Collins, G J ^a   Wolf, R G ^a   Stoner, R J ^b  

^a RUDOLPH TECHNOLOGIES INC   (United States)

^b BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOND STRENGTH (MATERIALS); DENSITY MEASUREMENT (SPECIFIC GRAVITY); INTERFACES (MATERIALS); LASER DIAGNOSTICS; METALLIC FILMS; METALLIC SUPERLATTICES; MULTILAYERS; PROCESS CONTROL; ROUGHNESS MEASUREMENT; SONAR; THICKNESS MEASUREMENT; ULTRASONIC MEASUREMENT; ADHESION; LASER APPLICATIONS;

PICOSECOND ULTRASONIC LASER SONAR (PULSE); ULTRASONIC MULTILAYER METAL FILM METROLOGY;

INTEGRATED CIRCUIT MANUFACTURE; METALLIC FILMS;

EID: 0031150833     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (7)

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