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Volumn 154, Issue 1, 2007, Pages

The effect of frictional and adhesion forces attributed to slurry particles on the surface quality of polished copper

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA SLURRY; CHEMICAL MECHANICAL PLANARIZATION; PARTICLE CONTAMINATION; SLURRY PARTICLES;

EID: 33845272085     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2393051     Document Type: Article
Times cited : (17)

References (16)
  • 5
    • 0032050490 scopus 로고    scopus 로고
    • Y. Ando and J. Ino, Wear, 216, 115 (1998).
    • (1998) Wear , vol.216 , pp. 115
    • Ando, Y.1    Ino, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.