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Volumn 154, Issue 1, 2007, Pages
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The effect of frictional and adhesion forces attributed to slurry particles on the surface quality of polished copper
a a,c a,b a,b a,d |
Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA SLURRY;
CHEMICAL MECHANICAL PLANARIZATION;
PARTICLE CONTAMINATION;
SLURRY PARTICLES;
ADHESION;
ALUMINA;
CARBOXYLIC ACIDS;
MECHANICAL PROPERTIES;
SILICA;
SLURRIES;
COPPER;
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EID: 33845272085
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.2393051 Document Type: Article |
Times cited : (17)
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References (16)
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