Modeling of linewidth measurement in scanning electron microscopes using advanced Monte Carlo software

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3121-3124

  Babin, S ^a   Borisov, S ^a   Ivanchikov, A ^a   Ruzavin, I ^a  

^a ABEAM TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; EDGE DETECTION; ERROR CORRECTION; MATHEMATICAL MODELS; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY;

EDGE POSITION; LINEWIDTH MEASUREMENT;

NANOTECHNOLOGY;

EID: 33845244377     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2366701     Document Type: Article

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