Modeling and simulation issues in Monte Carlo calculation of electron interaction with solid targets

Microelectronic Engineering

Volumn 69, Issue 2-4, 2003, Pages 594-605

  Ivin, V V ^a   Silakov, M V ^a   Babushkin, G A ^a   Lu, B ^a   Mangat, P J ^b   Nordquist, K J ^b   Resnick, D J ^b  

^a SOFT TEC   (Russian Federation)

^b MOTOROLA INC   (United States)

Author keywords

Backscatter coefficient; Differential scatter cross section; Electron stopping power; Electron solid interaction; Proximity effect

Indexed keywords

COMPUTER SIMULATION; ELASTICITY; ELECTROMAGNETIC WAVE BACKSCATTERING; ELECTRON BEAMS; ELECTRON SCATTERING; MONTE CARLO METHODS;

ELECTRON-SOLID INTERACTIONS;

MICROELECTRONIC PROCESSING;

EID: 0141791546     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00351-4     Document Type: Conference Paper

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