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Volumn 100, Issue 10, 2006, Pages
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Nano- and microscale adhesion energy measurement for Au-Au contacts in microswitch structures
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION ENERGIES;
ADHESION ENERGY MEASUREMENT;
FRACTURE MECHANICS MODELS;
MICROSWITCH STRUCTURES;
ADHESION;
FRACTURE MECHANICS;
GOLD;
MATHEMATICAL MODELS;
MEASUREMENT THEORY;
MICROELECTROMECHANICAL DEVICES;
SCANNING ELECTRON MICROSCOPY;
NANOSTRUCTURED MATERIALS;
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EID: 33845225607
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2388688 Document Type: Article |
Times cited : (14)
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References (27)
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