Fast and efficient phase conflict detection and correction in standard-cell layouts

IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD

Volumn 2005, Issue , 2005, Pages 149-156

  Chiang, C ^a   Kahng, A B ^b   Sinha, S ^a   Xu, X ^b  

^a SYNOPSYS INC   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATING APERTURE PHASE SHIFT MASKING (AAPSM); CELL BLOCKS; LAYOUT MODIFICATION SCHEME; PHASE CONFLICT DETECTION; RESOLUTION ENHANCEMENT TECHNOLOGY (RET);

COMPUTATION THEORY; PHASE MODULATION; POLYSILICON; PROBLEM SOLVING; STRUCTURAL DESIGN;

PHASE SHIFTERS;

EID: 33751399217     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCAD.2005.1560055     Document Type: Conference Paper

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