Bright-field AAPSM conflict detection and correction

Proceedings -Design, Automation and Test in Europe, DATE '05

Volumn II, Issue , 2005, Pages 908-913

  Chiang, C ^a   Kahng, A ^b   Sinha, S ^a   Xu, X ^b   Zelikovsky, A ^c  

^a SYNOPSYS INC   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c GEORGIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATING-APERTURE PHASE SHIFT MASKING (AAPSM); LAYOUT MODIFICATIONS; PHASE CONFLICTS;

CONSTRAINT THEORY; IMAGING TECHNIQUES; MASKS; PHASE SHIFT; POLYSILICON; SYSTEMS ANALYSIS;

INTEGRATED CIRCUITS;

EID: 33646922580     PISSN: 15301591     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DATE.2005.84     Document Type: Conference Paper

References (11)

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