Layout modification for library cell Alt-PSM composability

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5379, Issue , 2004, Pages 253-259

  Cao, Ke ^a   Hu, Jiang ^a   Cheng, Mosong ^a  

^a TEXAS A AND M UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATING PHASE SHIFTING MASK (ALT-PSM); LAYOUT MODIFICATION; OPTICAL PROXIMITY CORRECTION (OPC); RESOLUTION ENHANCEMENT TECHNIQUES (RET);

ALGORITHMS; ERROR CORRECTION; GATES (TRANSISTOR); GRAPH THEORY; LITHOGRAPHY; MICROPROCESSOR CHIPS; PROBLEM SOLVING;

PHASE SHIFT;

EID: 2942655169     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.538900     Document Type: Conference Paper

References (7)

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4. C. Pierrat, M. Cote, K. Patterson, "New alternating phase-shifting mask conversion methodology using phase conflict resolution". http://www.synopsys.com/products/ntimrg/abstracts/FullPhase.html
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