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Surface and Coatings Technology

Volumn 200, Issue 5-6, 2005, Pages 1351-1355

Fabrication and characterization of non-evaporable porous getter films

(5) Li, Chien Cheng a Huang, Jow Lay a Lin, Ran Jin b,c Chang, Hsiao Kuo a,d Ting, Jyh Ming a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

c Intellectual Property Exchange Limited (Taiwan)

d KINIK Company (Taiwan)

Author keywords

Getter; Glancing angle; Porous films; Titanium

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; GAS ADSORPTION; GETTERS; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; METALLIC FILMS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; POROUS MATERIALS; SILICON; SPUTTER DEPOSITION;

FILM GETTERS; GLANCING ANGLE; NANO-COLUMNAR CRYSTALLINE CRYSTALS; POROUS FILMS;

TITANIUM;

COATING;

EID: 28844464791 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.08.076 Document Type: Article

Times cited : (19)

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