Spectroscopic study on the evolution of graphite ablation plume in ECR argon plasma during the deposition of diamond-like carbon films

Diamond and Related Materials

Volumn 16, Issue 1, 2007, Pages 124-130

  Gong, Z S ^a   Sun, J ^a   Xu, N ^a   Ying, Z F ^a   Lu, Y F ^a   Yu, D ^a   Wu, J D ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Diamond like carbon; Electron cyclotron resonance microwave discharge; Optical emission spectroscopy; Plume emission; Pulsed laser ablation

Indexed keywords

ARGON; DIMERS; ELECTRON CYCLOTRON RESONANCE; GRAPHITE; PARTICULATE EMISSIONS; PULSED LASER DEPOSITION; THERMAL PLUMES;

ARGON PLASMA; FILM DEPOSITION; GASEOUS PRECURSORS; OPTICAL EMISSION SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 33751211219     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.04.007     Document Type: Article

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