Diamond-like carbon thin films prepared by ECR argon plasma assisted pulsed laser deposition

Diamond and Related Materials

Volumn 15, Issue 9, 2006, Pages 1235-1241

  Wu, A M ^a   Sun, J ^a   Shen, X K ^a   Xu, N ^a   Ying, Z F ^a   Dong, Z B ^a   Wu, J D ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Diamond like carbon; Electron cyclotron resonance microwave discharge; Plasma assisted deposition; Plume emission; Pulsed laser deposition

Indexed keywords

DIAMOND LIKE CARBON FILMS; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT EMISSION; PULSED LASER DEPOSITION; RAMAN SPECTROSCOPY;

DIAMOND-LIKE CARBON; ELECTRON CYCLOTRON RESONANCE MICROWAVE DISCHARGE; PLASMA ASSISTED DEPOSITION; PLUME EMISSION;

THIN FILMS;

EID: 33746599449     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.09.039     Document Type: Article

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