Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 2-7

  Woytasik, M ^a   Grandchamp, J P ^a   Dufour Gergam, E ^a   Gilles, J P ^a   Megherbi, S ^a   Martincic, E ^a   Mathias, H ^a   Crozat, P ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Copper micromoulding; Micromachining on flexible substrates; Microsolenoids; Planar microcoils

Indexed keywords

MICROMACHINING; PHOTOLITHOGRAPHY; PHOTORESISTORS; SUBSTRATES; THICK FILMS;

COPPER MICROMOULDING; MAGNETIC SENSORS; MICROCOIL FABRICATION; MICROSOLENOIDS; PLANAR MICROCOILS;

SENSORS;

EID: 33751093572     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.062     Document Type: Article

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