Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1999, Pages 227-233

  Ding, Xianhe ^a   Kuribayashi, Katsutoshi ^a   Hashida, Takao ^a  

^a YAMAGUCHI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DISTANCE MEASUREMENT; ELECTROPLATING; MICROMACHINING; MOBILE ROBOTS; PHOTORESISTS; POSITION CONTROL; SENSORS; SPUTTERING;

MICROELECTROMAGNETIC DISTANCE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033307724     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)