Electromagnetic micro-device realized by electrochemical way

Sensors and Actuators, A: Physical

Volumn 91, Issue 1-2, 2001, Pages 80-84

  Coutrot, Anne Lise ^a   Dufour Gergam, Elisabeth ^a   Martincic, Emile ^a   Gilles, Jean Paul ^a   Grandchamp, Jean Paul ^a   Quemper, Jean Marie ^a   Bosseboeuf, Alain ^a   Alves, Francisco ^b   Ahamada, Baroini ^b  

^a UNIV PARIS SUD   (France)

^b Signaux et Robotique   (France)

Author keywords

Copper; Electrodeposition; Micro coil; Micro moulding; Permalloy

Indexed keywords

ALLOYS; CALCULATIONS; CAPACITANCE; COPPER; ELECTRODEPOSITION; FABRICATION; INDUCTANCE; MAGNETIC FIELD MEASUREMENT; MAGNETIC PROPERTIES; MICROELECTROMECHANICAL DEVICES; MOLDING; PHOTOLITHOGRAPHY;

ELECTROMAGNETIC MICRODEVICE; ELECTROPLATED COPPER; LOW FREQUENCY APPLICATIONS; MICRO COILS; PERMALLOY;

ELECTRIC COILS;

EID: 0035811379     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00503-9     Document Type: Article

References (12)