Eddy-current microsensor based on thin-film technology

IEEE Transactions on Magnetics

Volumn 38, Issue 5 I, 2002, Pages 3368-3370

  Gatzen, Hans H ^a   Andreeva, Ekaterina ^a   Iswahjudi, Heri ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Eddy current sensor; Microsensor; Proximity measurement

Indexed keywords

EDDY CURRENTS; ELECTROPLATING; FINITE ELEMENT METHOD; MAGNETIC CORES; MICROSENSORS; OPTIMAL SYSTEMS; PHOTORESISTS; SOFT MAGNETIC MATERIALS; SPUTTER DEPOSITION;

SOFT-MAGNETIC CORES;

MAGNETIC THIN FILMS;

EID: 0036762069     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2002.802289     Document Type: Article

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