Elasticity study of very thin Cu films

Materials Science and Engineering: A

Volumn 442, Issue 1-2 SPEC. ISS., 2006, Pages 336-341

  Fujiwara, K ^a   Tanimoto, H ^a   Mizubayashi, H ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Capping effect; Cu thin film; Internal friction; Internal stress; Surface morphology; Young's modulus

Indexed keywords

ANNEALING; ELASTIC MODULI; ELASTICITY; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; INTERNAL FRICTION; MORPHOLOGY; RESIDUAL STRESSES; SURFACE ROUGHNESS; THIN FILMS;

ANELASTIC RESPONSE; CAPPING EFFECT; COPPER THIN FILM;

COPPER;

ANNEALING; COPPER; ELASTIC MODULI; ELASTICITY; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; INTERNAL FRICTION; MORPHOLOGY; RESIDUAL STRESSES; SURFACE ROUGHNESS; THIN FILMS;

EID: 33751086218     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2006.01.138     Document Type: Article

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