Diffusional creep in damascene Cu lines

Journal of Applied Physics

Volumn 89, Issue 1, 2001, Pages 91-98

  Kobrinsky, Mauro J ^a   Thompson, Carl V ^a   Gross, Mihal E ^b  

^a Department of Civil and Environmental Engineering   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347496588     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1326856     Document Type: Article

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