SCOPUS 정보 검색 플랫폼

Journal of Metastable and Nanocrystalline Materials

Volumn 24-25, Issue , 2005, Pages 61-64

Elasticity study of nanostructured copper thin films

(4) Mizubayashi, H a Fujita, K a Fujiwara, K a Tanimoto, H a

a UNIVERSITY OF TSUKUBA (Japan)

Author keywords

Copper thin films; Grain boundary; Internal friction; Young's modulus

Indexed keywords

COPPER THIN FILMS; CU FILMS; CU METALLIZATION; ELASTIC PROPERTIES; FILMS THINNERS; NANOSTRUCTURED COPPERS; TA BUFFER LAYERS; UNDERLYING MECHANISMS; YOUNG'S MODULUS;

ELASTIC MODULI; ELASTIC WAVES; ELASTICITY; FILM GROWTH; GRAIN BOUNDARIES; GRAIN GROWTH; GRAIN SIZE AND SHAPE; INTERNAL FRICTION; MAGNETIC FILMS; MOLECULAR BEAM EPITAXY; SEMICONDUCTING SILICON COMPOUNDS; TANTALUM; THIN FILMS;

COPPER;

EID: 33751094218 PISSN: 14226375 EISSN: None Source Type: Journal
DOI: 10.4028/www.scientific.net/JMNM.24-25.61 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.