Amorphous metal alloy based MEMS for RF applications

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 283-288

  Ylönen, Mari ^a   Vähä Heikkilä, Tauno ^a   Kattelus, Hannu ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Amorphous metal alloys; Mo Si N; RF MEMS; Variable capacitor

Indexed keywords

AMORPHOUS ALLOYS; CAPACITORS; MILLIMETER WAVE DEVICES; RESIDUAL STRESSES; SPUTTER DEPOSITION; TENSILE STRENGTH;

AMORPHOUS METAL ALLOYS; ATOMIC COMPOSITION; SURFACE MICROMECHANICAL PROCESS; VARIABLE CAPACITOR;

MICROELECTROMECHANICAL DEVICES;

EID: 33751079148     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.05.033     Document Type: Article

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