Fabrication and characteristics of a micromachined ceramic pressure sensor based on tantalum-nitride thin-film strain gauges

Journal of the Korean Physical Society

Volumn 49, Issue 4, 2006, Pages 1379-1383

  Chung, Gwiy Sang ^a   Lee, Kyu Chol ^a   Lee, Jong Hwa ^a  

^a University of Ulsan   (South Korea)

Author keywords

Ceramic pressure sensor; Micromachined; Strain gauge; TaN thin film

Indexed keywords

EID: 33751051836     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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