Second-order piezoresistance coefficients of n-type silicon

Japanese Journal of Applied Physics

Volumn 28, Issue 10 A, 1989, Pages L1676-L1677

  Matsuda, Kazunori ^a   Kanda, Yozo ^a   Suzuki, Katuhisa ^a,b  

^a HAMAMATSU UNIVERSITY SCHOOL OF MEDICINE   (Japan)

^b TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Mechanical sensor; N Si; Nonlinearity; Piezoresistance; Second order

Indexed keywords

PIEZOELECTRICITY; SENSORS; STRESSES;

MECHANICAL SENSOR; PIEZORESISTANCE EFFECT;

SEMICONDUCTING SILICON;

EID: 0024753505     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.28.L1676     Document Type: Article

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