In situ mass measurement of electron-beam-induced nanometer-sized W-related deposits using a carbon nanotube cantilever

Applied Physics Letters

Volumn 89, Issue 19, 2006, Pages

  Sawaya, Shintaro ^a   Akita, Seiji ^a   Nakayama, Yoshikazu ^a,b  

^a Osaka Prefecture University   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CARRIER CONCENTRATION; DECOMPOSITION; ELECTRIC POTENTIAL; OSCILLATIONS; TUNGSTEN COMPOUNDS;

ACCELERATION VOLTAGE; CARBON NANOTUBE OSCILLATORS; DEPOSITION RATES; SITU MEASUREMENTS;

ELECTRON BEAMS;

EID: 33750912285     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2387886     Document Type: Article

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