Effects of gas flow rate on diamond deposition in a microwave plasma reactor

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1970-1975

  Chen, W ^a   Lu, X ^a   Yang, Q ^a   Xiao, C ^a   Sammynaiken, R ^b   Maley, J ^b   Hirose, A ^a  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b UNIVERSITY OF SASKATCHEWAN   (Canada)

Author keywords

Chemical vapor deposition (CVD); Diamond; Field emission; Nanostructures; Plasma processing and deposition; Surface roughness

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; FLOW PATTERNS; GAS DYNAMICS; MICROWAVE DEVICES; RAMAN SPECTROSCOPY; SILICON; SURFACE ROUGHNESS;

FIELD EMISSION; NANOSTRUCTURES; PLASMA DEPOSITION; PLASMA PROCESSING;

CHEMICAL REACTORS;

EID: 33750800866     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.08.007     Document Type: Article

References (26)

1. Angus J.C., and Hayman C.C. Science 241 (1988) 913
2. Yugo S., Kanai T., Kimura T., and Muto T. Appl. Phys. Lett. 58 (1991) 1036
3. Liu H.M., and Danny D.S. Diamond Relat. Mater. 4 (1995) 1173
4. Dua A.K., George V.C., Friedrich M., and Zahn D.R.T. Diamond Relat. Mater. 13 (2004) 74
5. Rau H., and Picht F. J. Mater. Res. 7 (1992) 934
6. Kweon D.W., Lee J.Y., and Kim D. J. Appl. Phys. 69 (1991) 8329
7. Celii F.G., White Jr. D., and Purdes A.J. J. Appl. Phys. 70 (1991) 5636
8. Celii F.G., White Jr. D., and Purdes A.J. Thin Solid Films 212 (1992) 140
9. Yu J., Huang R., Wen L., and Shi C. J. Mater. Sci. Lett. 17 (1998) 1011
10. Yu J., Huang R., Wen L., and Shi C. Mater. Res. Bull. 34 (1999) 2319
11. Fan Q.H., Pereira E., and Cracio J. J. Mater. Sci. 34 (1999) 1353
12. Buchkremer-Hermanns H., Ren H., and Weiβ H. Diamond Relat. Mater. 5 (1996) 312
13. Lu X., Yang Q., Xiao C., and Hirose A. Appl. Phys., A 82 (2005) 293
14. Yarbrough W.A., and Messier R. Science 247 (1990) 3842
15. Pfeiffer R., Kuzmany H., Knoll P., Bokova S., Salk N., and Gunther B. Diamond Relat. Mater. 12 (2003) 268
16. Robin L.H., Farabaugh E.N., and Feldman A. J. Mater. Res. 5 (1990) 2456
17. Wada N., and Solin S.A. Physica B 105 (1981) 353
18. JCDPS Powder Diffraction File; International Centre for Diffraction Data, Swarthmor, 1990.
19. Gruen D.M. Annu. Rev. Mater. Sci. 29 (1999) 211
20. Lee Y.C., Lin S.J., Chia C.T., Cheng H.F., and Lin I.N. Diamond Relat. Mater. 13 (2004) 2100
21. Gruen D.M., Liu S., Krauss A.R., Luo J., and Pan X. Appl. Phys. Lett. 64 (1994) 1502
22. McCauley T.G., Gruen D.M., and Krauss A.R. Appl. Phys. Lett. 73 (1998) 1646
23. Zhou D., Gruen D.M., Qin L.C., McCauley T.G., and Krauss A.R. J. Appl. Phys. 84 (1998) 1981
24. Gu C.Z., and Jiang X. J. Appl. Phys. 88 (2000) 1788
25. Sharda T., Umeno M., Soga T., and Jimbo T. Appl. Phys. Lett. 77 (2000) 4304
26. Chen L.C., Kichambare P.D., Chen K.H., Wu J.-J., Yang J.R., and Lin S.T. J. Appl. Phys. 89 (2001) 753