Effects of density of gas flow rate on large area diamond growth in hot filament chemical vapor deposition

Journal of Materials Science Letters

Volumn 17, Issue 12, 1998, Pages 1011-1013

  Yu, Jie ^a,b   Huang, Rongfang ^b   Wen, Lishi ^b   Shi, Changxu ^b  

^a INSTITUTE OF PHYSICS   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DENSITY OF GASES; DIAMOND FILMS; MASS TRANSFER; NUCLEATION; SCANNING ELECTRON MICROSCOPY;

DIAMOND GROWTH; HOT FILAMENT CHEMICAL VAPOR DEPOSITION;

FILM GROWTH;

EID: 0032083736     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006626404000     Document Type: Article

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