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Volumn 34, Issue 6, 1999, Pages 1353-1365
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Diamond deposition on copper: studies on nucleation, growth, and adhesion behaviours
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Author keywords
[No Author keywords available]
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Indexed keywords
ABRASIVE COATINGS;
ADHESION;
COPPER;
CRYSTAL GROWTH;
DENSITY (SPECIFIC GRAVITY);
FILMS;
MICROWAVES;
NUCLEATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PRESSURE EFFECTS;
RESIDUAL STRESSES;
SUBSTRATES;
FREE STANDING DIAMOND FILMS;
GAS PRESSURE;
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION;
MICROWAVE POWER;
TITANIUM INTERLAYER;
DIAMONDS;
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EID: 0033101006
PISSN: 00222461
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1004566502572 Document Type: Article |
Times cited : (49)
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References (22)
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