Analysis of quasi-static and dynamic motion mechanisms for piezoelectric miniature robots

Sensors and Actuators, A: Physical

Volumn 132, Issue 2, 2006, Pages 632-642

  Simu, Urban ^a   Johansson, Stefan ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Actuator; Microrobot; Piezoelectric; Stick slip; Walking

Indexed keywords

ACTUATORS; MINIATURE INSTRUMENTS; MONOLITHIC INTEGRATED CIRCUITS; MOTION PLANNING; MULTILAYERS; PIEZOELECTRIC DEVICES; VELOCITY CONTROL;

MICROROBOTS; QUASI STATIC MOTION MECHANISMS; STICK SLIPS; WALKING;

ROBOTS;

EID: 33750691707     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.02.023     Document Type: Article

References (16)

1. Alexander P.W., Brei D., Miao W., Halloran J.W., Gentilman R.L., Schmidt G.E., McGuire P.T., and Hollenbeck J.R. Fabrication and experimental characterization of d/sub 31/telescopic piezoelectric actuators. J. Mater. Sci. 36 (2001) 4231-4237
2. Dogan A., Uchino K., and Newnham R.E. Composite piezoelectric transducer with truncated conical endcaps "cymbal". IEEE Trans. Ultrason. Ferroelectr. Freq. Control 44 (1997) 597-605
3. Burleigh Instruments Inc., US Patent 3,902,084 (1975).
4. Pohl D.W. Dynamic piezoelectric translation devices. Rev. Sci. Instrum. 58 (1987) 54-57
5. van der Wulp H., Pistecky P.V., and Heerens W.C. Subnanometer stability of nanostage supports. J. Vacuum Sci. Technol. B 15 (1997) 566-573
6. Breguet J.-M., and Renaud P. A 4-degrees-of-freedom microrobot with nanometer resolution. Robotica 14 (1996) 199-203
7. Wörn H., Munassypov R., and Fatikow S. Actuation principle and motion control of a three-leg piezoelectric micromanipulation robot. 6th International Conference on New Actuators (Actuator 98). Bremen, Germany (1998) 203-206
8. Martel S., Madden P., Sosnowski L., and Hunter I. NanoWalker: a fully autonomous highly integrated miniature robot for nano-scale measurements. Proc. SPIE Int. Soc. Opt. Eng. 3825 (1999) 111-122
9. Van Hees I.J.B., Nijsse G.J.P., and Spronck J.W. A manipulator using piezos in the inertial sliding mode for the actuation in six degrees of freedom simultaneously. 6th International Conference on New Actuators (Actuator 98). Bremen, Germany (1998) 245-248
10. Kladitis P.E., and Bright V.M. Prototype microrobots for micro-positioning and micro-unmanned vehicles. Sens. Actuators A80 (2000) 132-137
11. Smits J.G. Design considerations of a piezoelectric-on-silicon microrobot. Sens. Actuators A35 (1992) 129-135
12. Schmitt C., Breguet J.-M., Bergander A., and Clavel R. Stick and slip actuators (SSA). Proc. SPIE Int. Soc. Opt. Eng. 4194 (2000) 65-74
13. Simu U., and Johansson S. Fabrication of monolithic piezoelectric drive units for a miniature robot. J. Micromech. Microeng. 12 (2002) 582-589
14. Lilliehorn T., Simu U., and Johansson S. Multilayer telescopic piezoactuator fabricated by a prototyping process based on milling. Sens. Actuators A107 (2002) 159-168
15. Simu U., and Johansson S. Evaluation of a monolithic piezoelectric drive unit for a miniature robot. Sens. Actuators A101 (2002) 175-184
16. Miribel-Català P., Montané E., López-Sánchez J., Puig-Vidal M., Bota S.A., Samitier J., Simu U., and Johansson S. Smart power integrated circuit for a piezoelectric miniature robot. J. Analog Integr. Circuits Signal Process. (2002) 191-200