Subnanometer stability of nanostage supports

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 3, 1997, Pages 566-573

  Van Der Wulp, H ^a   Pistecky, P V ^a   Heerens, W Chr ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2442567562     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589293     Document Type: Article

References (17)

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