NanoWalker: A fully autonomous highly integrated miniature robot for nanoscale measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3825, Issue , 1999, Pages 111-122

  Martel, Sylvain M ^a   Madden, Peter G ^a   Sosnowski, Luke ^a   Hunter, Ian W ^a   Lafontaine, Serge ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

flexible printed circuit; flip chip; instrument; miniature robot; nano scale; NanoWalker; piezo actuator; scanning tunneling microscope

Indexed keywords

ACTUATORS; EMBEDDED SYSTEMS; FLEXIBLE ELECTRONICS; INSTRUMENTS; MICROMACHINING; MICROMANIPULATORS; MICROSYSTEMS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; NANOTECHNOLOGY; NAVIGATION SYSTEMS; PRINTED CIRCUITS; SCANNING TUNNELING MICROSCOPY;

FLEXIBLE PRINTED CIRCUIT; FLIP CHIP; MINIATURE ROBOTS; NANO SCALE; NANOWALKER; PIEZO ACTUATOR;

ROBOTS;

EID: 27744487654     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.364292     Document Type: Conference Paper

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