Stick and Slip Actuators (SSA)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4194, Issue 1, 2000, Pages 65-74

  Schmitt, C ^a   Breguet, J M ^a   Bergander, A ^a   Clavel, R ^a  

^a EPFL   (Switzerland)

Author keywords

Microfactory; Motion control; Nanofactory; Nanometer; Nanotechnology; Piezo actuator; Positioning systems; Scanning Probe Microscope; Stick and slip

Indexed keywords

INTERFACES (MATERIALS); MANIPULATORS; MOTION CONTROL; NANOTECHNOLOGY; OPTICAL MICROSCOPY; ROBOTIC ASSEMBLY; WEAR RESISTANCE;

MICROFACTORY; NANOFACTORY; PIEZOACTUATORS; SCANNING PROBE MICROSCOPY;

ACTUATORS;

EID: 0034516145     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.403704     Document Type: Article

References (0)