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Journal of Micromechanics and Microengineering

Volumn 12, Issue 5, 2002, Pages 582-589

Fabrication of monolithic piezoelectric drive units for a miniature robot

(2) Simu, Urban a Johansson, Stefan a

a UPPSALA UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; ASSEMBLY; COMPUTER CONTROL SYSTEMS; DIGITAL CONTROL SYSTEMS; MULTILAYERS; NUMERICAL CONTROL SYSTEMS; PIEZOELECTRIC DEVICES; ROBOTICS; SCREEN PRINTING; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS;

MICROMILLING MACHINE; MICROROBOTS; MINIATURE ROBOTS; MONOLITHIC PIEZOELECTRIC DRIVE UNITS; MULTILAYER PIEZOCERAMIC; POWER DRIVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036732306 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/12/5/311 Document Type: Article

Times cited : (42)

References (21)

1
- 0010398795
- Polyimide v-groove joints for three-dimensional silicon transducers
- PhD Thesis Royal Institute of Technology, Stockholm
- (2000)
- Ebefors, T.¹

2
- 0034276117
- A robust micro conveyer realized by arrayed polyimide joint actuators
- (2000) J. Micromech. Microeng. , vol.10 , pp. 337-349
- Ebefors, T.¹ Mattsson, J.U.² Kalvesten, E.³ Stemme, G.⁴

3
- 0033903377
- Prototype microrobots for micro-positioning and micro-unmanned vehicles
- (2000) Sensors Actuators A , vol.80 , pp. 132-137
- Kladitis, P.E.¹ Bright, V.M.²

4
- 0034516145
- Stick and slip actuators (SSA)
- (2000) Proc. SPIE , vol.4194 , pp. 65-74
- Schmitt, C.¹ Breguet, J.-M.² Bergander, A.³ Clavel, R.⁴

5
- 27744487654
- NanoWalker: A fully autonomous highly integrated miniature robot for nano-scale measurements
- (1999) Proc. SPIE , vol.3825 , pp. 111-122
- Martel, S.¹ Madden, P.² Sosnowski, L.³ Hunter, I.⁴

6
- 0002588270
- Actuation principle and motion control of a three-leg piezoelectric micromanipulation robot
- (1998) Proc. Actuator 98, 6th Int. Conf. on New Actuators (Bremen, Germany, 17-19 June) , pp. 203-206
- Wörn, H.¹ Munassypov, R.² Fatikow, S.³

7
- 0003680748
- (Boston: Kluwer)
- (1997) Piezoelectric Actuators and Ultrasonic Motors
- Uchino, K.¹

8
- 0005095779
- Burleigh Instruments Inc.
- (1975) US Patent Specification No 3902084

9
- 0026986188
- Design considerations of a piezoelectric-on-silicon microrobot
- (1992) Sensors Actuators A , vol.35 , pp. 129-135
- Smits, J.G.¹

10
- 0001713732
- ed N Setter et al (Berlin: Birkhäuser)
- (1993) Ferroelectric Ceramics, Tutorial Reviews, Theory, Processing and Applications , pp. 241-272
- Bell, A.J.¹

11
- 0010356615
- ed J B Wachtman et al (Park Ridge: Noyes Publications)
- (1993) Ceramic Films and Coatings , pp. 284-302
- Shanefield, D.J.¹

12
- 0002616993
- Approaching the limits: The latest developments in multilayer ceramic capacitors
- (1993) Electron. Eng. , vol.65 , pp. 39-44
- Ward, P.¹

13
- 4244085957
- Microfabrication and evaluation of piezoceramic actuators
- PhD Thesis Uppsala University
- (1998)
- Bexell, M.¹

14
- 0032637117
- Fabrication and evaluation of a piezoelectric maniature motor
- (1999) Sensors Actuators A , vol.75 , pp. 8-16
- Bexell, M.¹ Johansson, S.²

15
- 0035148925
- 3 microrobot system
- (2001) Proc. SPIE 8th Annual Int. Symp. on Smart Structures and Materials (New Port Beach, CA, 4-8 March)
- Puig-Vidal, M.¹ López-Sánchez, J.² Miribel-Català, P.³ Montené, E.⁴ Bota, S.A.⁵ Samitier, J.⁶ Simu, U.⁷ Johansson, S.⁸

16
- 0000318788
- Influence of surface coatings on elasticity, residual stresses, and fracture properties of silicon microelements
- (1989) J. Appl. Phys. , vol.65 , pp. 122-128
- Johansson, S.¹ Ericson, F.² Schweitz, J.-A.³

17
- 0032644335
- Microassembly of a piezoelectric miniature motor
- (1999) J. Electroceramics , vol.3 , pp. 73-83
- Bexell, M.¹ Johansson, S.²

18
- 0010397303
- A manipulator using piezos in the inertial sliding mode for the actuation in six degrees of freedom simultaneously
- (1998) Proc. Actuator 98, 6th Int. Conf. on New Actuators (Bremen, Germany, 17-19 June) , pp. 245-248
- Van Hees, I.J.B.¹ Nijsse, G.J.P.² Spronck, J.W.³

19
- 0010356238
- (Hanser Gardner Publications)
- (1996) Modern Metal Cutting: A Practical Handbook
- Coromant, S.¹

20
- 0010357720
- Thick-film fine-line fabrication techniques - Application to front matellisation of solar cells
- (1993) Hybrid Circuits , vol.30 , pp. 18-22
- Dziedzic, A.¹ Nijs, J.² Szlufcik, J.³

21
- 0010310031
- Evaluation of a monolithic piezoelectric drive unit for a miniature robot
- submitted
- (2001) Sensors Actuators
- Simu, U.¹ Johansson, S.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.