Micromachining with ultrashort laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3618, Issue , 1999, Pages 114-121

  Zhao, J X ^a   Huettner, B ^a   Menschig, A ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FUSED SILICA; INSULATING MATERIALS; LASER PULSES; LIGHT ABSORPTION; MICROMACHINING; SEMICONDUCTING ALUMINUM COMPOUNDS; SOLID STATE LASERS; THERMAL DIFFUSION; THERMAL EFFECTS;

TITANIUM SAPPHIRE LASER; ULTRASHORT PULSES;

PULSED LASER APPLICATIONS;

EID: 0033364061     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)