A 100 kV/200 A Blumlein pulser for high-energy plasma implantation

IEEE Transactions on Plasma Science

Volumn 34, Issue 5 I, 2006, Pages 1766-1770

  Rossi, José O ^a   Ueda, Mário ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

Blumlein pulser; Hardness factor; Nitrogen; Plasma implantation; Stainless steel (SS); Surface treatment

Indexed keywords

ION IMPLANTATION; MICROHARDNESS; NITROGEN; STAINLESS STEEL; SUBSTRATES; SURFACE TREATMENT;

BLUMLEIN PULSER; HARDNESS FACTOR; HIGH-ENERGY PLASMA IMPLANTATION;

PLASMA APPLICATIONS;

EID: 33750420002     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.881305     Document Type: Conference Paper

References (15)

1. J. R. Conrad, J. L. Radke, R. A. Dood, F. J. Worzala, and N. C. Tran, "Plasma source ion-implantation technique for surface modification of materials," J. Appl. Phys., vol. 62, no. 11, pp. 4591-4596, Dec. 1987.
2. K. G. Kostov, M. Ueda, I. H. Tan, N. F. Leite, A. F. Beloto, and G. F. Gomes, "Structural effect of nitrogen plasma-based ion implantation on ultra-high molecular weight polyethylene," Surf. Coat. Technol., vol. 186, no. 1/2, pp. 287-290, Aug. 2004.
3. K. C. Walter, R. A. Dodd, and J. R. Conrad, "Corrosion behavior of nitrogen implanted aluminum," Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At., vol. 106, no. 1-4, pp. 522-526, Dec. 1995.
4. M. Ueda, G. F. Gomes, E. Abramof, and H. Reuter, "In-line nitrogen PIII/ion nitriding processing of metallic materials," Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At., vol. 206, pp. 749-753, May 2003.
5. M. Ueda, G. F. Gomes, L. A. Berni, J. O. Rossi, J. J. Barroso, A. F. Beloto, E. Abramof, and H. Reuter, "Plasma immersion ion implantation using a glow discharge source with controlled plasma potential," Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At., vol. 161-163, pp. 1064-1068, Mar. 2000.
6. J. O. Rossi, M. Ueda, and J. J. Barroso, "Design of a 150-kV 300-A 100-Hz Blumlein pulser for long-pulse operation," IEEE Trans. Plasma Sci., vol. 30, no. 5, pp. 1622-1626, Oct. 2002.
7. J. O. Rossi, M. Ueda, and J. J. Barroso, "Pulsed power modulators for surface treatment by plasma immersion ion implantation," Braz. J. Phys., vol. 34, no. 4B, pp. 1565-1571, Dec. 2004.
8. J. O. Rossi, M. Ueda, and J. J. Barroso, "A hard-tube pulser of 60 kV, 10 A for experiment and modeling in plasma immersion ion implantation," IEEE Trans. Plasma Sci., vol. 28, no. 5, pp. 1392-1396, Oct. 2000.
9. F. Davanloo, C. B. Collins, and F. J. Agee, "High power repetitive stacked Blumlein pulsers commutated by a single switch element," IEEE Trans. Plasma Sci., vol. 26, no. 5, pp. 1463-1475, Oct. 1998.
10. I. C. Somerville, S. J. MacGregor, and O. Farish, "An efficient stacked-Blumlein HV pulse generator," Meas. Sci. Technol., vol. 1, no. 9, pp. 865-868, Sep. 1990.
11. P. N. Graneau, J. O. Rossi, M. P. Brown, and P.W. Smith, "A high voltage transmission line transformer with very low droop," Rev. Sci. Instrum., vol. 67, no. 7, pp. 2630-2635, Jul. 1996.
12. J. O. Rossi, I. H. Tan, and M. Ueda, "Plasma implantation using high-energy ions and short high voltage pulses," Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At., vol. 242, no. 1/2, pp. 328-331, Jan. 2006.
13. M. Ueda, H. Reuther, and C. M. Lepienski, "Comparison of nitrogen-ion beam and plasma implantation in Al5052 alloy," Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At., vol. 240, no. 1/2, pp. 199-203, Oct. 2005.
14. M. Ueda, M. M. Silva, C. Otani, H. Reuther, M. Yatsuzuka, C. M. Lepienski, and L. A. Berni, "Improvement of tribological properties of Ti6Al4V by nitrogen plasma immersion ion implantation," Surf. Coat. Technol., vol. 169-170, pp. 408-410, 2003.
15. M. Ueda, L. A. Berni, and R. M. Castro, "Application of plasma immersion ion implantation for improved performance of tools and industrial components," Surf. Coat. Technol., vol. 200, no. 1-4, pp. 517-520, Oct. 2005.