Comparison of nitrogen ion beam and plasma immersion implantation in Al5052 alloy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 240, Issue 1-2, 2005, Pages 199-203

  Ueda, M ^a   Reuther, H ^b   Lepienski, C M ^c  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

Author keywords

Al5052 alloy; Ion beam; Nitrogen ion implantation; Plasma immersion ion implantation

Indexed keywords

ALUMINUM ALLOYS; AUGER ELECTRON SPECTROSCOPY; ION BEAMS; LASER PULSES; NITROGEN; PLASMA SOURCES; X RAY DIFFRACTION;

AL5052 ALLOY; BEAM IMPLANTATION (BI); NITROGEN ION IMPLANTATION; PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

EID: 27344445275     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.06.115     Document Type: Conference Paper

References (14)

1. A.K. Vasudeyan R.D. Doherty Aluminum Alloys - Contemporary Research and Applications 1989 Academic Press, Inc. London
2. L. Xia, R. Wang, X. Ma, and Y. Sun J. Vac. Sci. Technol. B 12 1994 931
3. K. Yabe, O. Nishimura, T. Fujihana, and M. Iwaki Surf. Coat. Technol. 66 1994 250
4. K.C. Walter, R.A. Dodd, and J.R. Conrad Nucl. Instr. and Meth. B 106 1995 522
5. K.C. Walter J. Vac. Sci. Technol. B 12 1994 945
6. S. Schoser, G. Brauchle, and J. Forget Surf. Coat. Technol. 103&104 1998 222
7. S. Han, Y. Lee, and H. Kim Surf. Coat. Technol. 93 1997 261
8. N. Sakudo, D. Mizutani, and Y. Ohmura Nucl. Instr. and Meth. B 206 2003 687
9. J.V. Mantese, I.G. Brown, N.W. Cheung, and G.A. Collins MRS Bull. 21 1996 52
10. N.W. Cheung Mater. Chem. Phys. 46 1996 132
11. P.P. Smith, R.A. Buchanan, J.R. Roth, and S.G. Kamath J. Vac. Sci. Technol. B 12 1994 940
12. H. Reuther, E. Richter, F. Prokert, M. Ueda, A.F. Beloto, and G.F. Gomes Hyperfine Interact. 156 2004 575
13. E. Richter, R. Gunzel, and S. Parascandola Surf. Coat. Technol. 128&129 2000 21
14. M. Ueda, L.A. Berni, and J.O. Rossi Surf. Coat. Technol. 136 2001 28