Hard-tube pulser of 60 kV, 10 A for experiment and modeling in plasma immersion ion implantation

IEEE Transactions on Plasma Science

Volumn 28, Issue 5, 2000, Pages 1392-1396

  Rossi, Jose Osvaldo ^a   Ueda, Mario ^a   Barroso, Joaquim J ^a   Spassov, V A ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COAXIAL CABLES; ELECTRIC GENERATORS; GLOW DISCHARGES; PLASMA SHEATHS; PLASMAS;

HARD TUBE PULSER; HIGH VOLTAGE PULSE GENERATOR; PLASMA IMMERSION ION IMPLANTATION; PULSE FORMING NETWORK CIRCUIT; PULSE RISE TIME DISTORTION;

ION IMPLANTATION;

EID: 0034289996     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.901204     Document Type: Article

References (11)