Pulsed power modulators for surface treatment by plasma immersion ion implantation

Brazilian Journal of Physics

Volumn 34, Issue 4 B, 2004, Pages 1565-1571

  Rossi, J O ^a   Ueda, M ^a   Barroso, J J ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 12844274555     PISSN: 01039733     EISSN: None     Source Type: Journal    
DOI: 10.1590/S0103-97332004000800011     Document Type: Conference Paper

References (21)

1. J. L. Shohet, IEEE Trans. Pla. Sci. 19(5), 725 (1991).
2. J. R. Conrad and J. L. Radke. J. Appl. Phys. 62(11), 4591 (1997).
3. J. Brutscher, Rev. Sci. Instrum. 67(7), 2621 (1996).
4. J. O. Rossi, M. Ueda, and J. J. Barroso, and V. A. Spassov, IEEE Trans. Pla. Sci. 28(5), 1392 (2000).
5. J. O. Rossi, M. Ueda, and J. J. Barroso, Surf. Coat. Technol. 136, 43 (2001).
6. G. Böhm and R. Günzel, J. Vac. Sci. Technol. B 12(2), 821 (1994).
7. G. N. Glasoe and J. V. Lebacqz, Pulse Generators (McGraw-Hill, New York, 1948).
8. V. A. Spassov, J. Barroso, M. Ueda, and L. Guerguiev, Astrophys. and Space Sci. 256, 533 (1998).
9. V. A. Spassov, M. Ueda, and J. Barroso, Surf. Coat. Technol. 112, 29 (1999).
10. W. A. Reass, J. Vac. Sci. Technol. B12(2), 854 (1994).
11. J. O. Rossi, M. Ueda, and J. J. Barroso, AIP Conference Proceedings, vol. 563, 96-101, edited by H. Chuaqui and M. Favre (AIP, New York, 2001).
12. J. O. Rossi, M. Ueda, and J. J. Barroso, IEEE Trans. Pla. Sci. 30(5), 1622 (2002).
13. R. A. Fitch and V. T. S. Howell, Proc. IEE 111(4), 849 (1964).
14. M. Ueda, C. Stellati, V. A. Spassov, J. J. Barroso, and M. C. A. Nono, Surf. Coat. Technol. 112, 310 (1999).
15. M. Ueda, G. F. Gomes, L. A. Berni, J. O. Rossi, J. J. Barroso, A. F. Beloto, E. Abramof, and H. Reuter, Nucl. Intrum. Meth. Phys. Res. B 161-163, 1064 (2000).
16. M. Ueda, L. A. Berni, J. O. Rossi, J. J. Barroso, G. F. Gomes, A. F. Beloto, and E. Abramof, Surf. Coat. Technol. 136, 28 (2001).
17. J. O. Rossi, M. Ueda, and J. J. Barroso, WSEAS Trans. Syst. 1(2), 24 (2003).
18. J. O. Rossi, M. Ueda, and J. J. Barroso, in 14th Int. Pulsed Power Conf. 15-18 June 2003, TX, USA, 533.
19. J. O. Rossi, M. Ueda, and J. J. Barroso, in Brazilian Power Electronics Conf., 21-24 Sept. 2003, Fortaleza, CE, 521-523.
20. J. O. Rossi, M. Ueda, and J. J. Barroso, in Brazilian Power Electronics Conf. 11-14 Nov. 2001, Florianópolis, SC, vol.2, 569-553.
21. M. Ueda, L. A. Berni, R. M. Castro, A. F. Beloto, E. Abramof, J. O. Rossi, J. J. Barroso, and C. M. Lepienski, Surf. Coat. Technol. 156, 71 (2002).