In-line nitrogen PIII/ion nitriding processing of metallic materials

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 749-753

  Ueda, M ^a   Gomes, G F ^a   Abramof, E ^a   Reuther, H ^b  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

AES; Plasma immersion ion implantation; Plasma nitriding; X ray diffraction

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CATHODES; GLOW DISCHARGES; NITRIDING; PLASMA APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

PLASMA IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

EID: 0038581242     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00836-X     Document Type: Conference Paper

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